Invention Grant
- Patent Title: Illumination optical device for projection lithography
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Application No.: US16924702Application Date: 2020-07-09
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Publication No.: US11003086B2Publication Date: 2021-05-11
- Inventor: Stig Bieling , Markus Deguenther
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102018201009.9 20180123
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
An illumination optical unit for projection lithography illuminates an object field. The illumination optical unit has an optical rod with an entrance area and an exit area for illumination light. The optical rod is configured so that the illumination light is mixed and homogenized at lateral walls of the optical rod by multiple in-stances of total internal reflection. At least one correction area serves to correct a field dependence of an illumination angle distribution when illuminating the object field. The correction area is disposed in the region of the exit area of the optical rod. This can result in an illumination optical unit, in which an unwanted field dependence of a specified illumination angle distribution is reduced or entirely avoided, even in the case of illumination angle distributions with illumination angles deviating extremely from a normal incidence on the object field.
Public/Granted literature
- US20200341384A1 ILLUMINATION OPTICAL DEVICE FOR PROJECTION LITHOGRAPHY Public/Granted day:2020-10-29
Information query
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