Invention Grant
- Patent Title: Amorphous carbon thin film, manufacturing method thereof and optical system including the same
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Application No.: US16055627Application Date: 2018-08-06
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Publication No.: US11004659B2Publication Date: 2021-05-11
- Inventor: Jih-Perng Leu , Jui-Min Chang
- Applicant: NATIONAL CHIAO TUNG UNIVERSITY
- Applicant Address: TW Hsinchu
- Assignee: NATIONAL CHIAO TUNG UNIVERSITY
- Current Assignee: NATIONAL CHIAO TUNG UNIVERSITY
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW106136513 20171024
- Main IPC: C23C16/26
- IPC: C23C16/26 ; H01J37/32 ; G02B5/28 ; C23C16/34 ; C23C16/509 ; G02C7/10
Abstract:
A method of manufacturing an amorphous carbon thin film is provided. The method includes the following steps: providing a substrate in a reaction chamber; flowing a precursor and a carrier gas into the reaction chamber; and performing a PECVD method to deposit the amorphous carbon thin film on the substrate. Wherein, the precursor includes a compound having a C≡N functional group.
Public/Granted literature
- US20190122862A1 AMORPHOUS CARBON THIN FILM, MANUFACTURING METHOD THEREOF AND OPTICAL SYSTEM INCLUDING THE SAME Public/Granted day:2019-04-25
Information query
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