- Patent Title: Manufacture of power devices having increased cross over current
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Application No.: US16945781Application Date: 2020-07-31
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Publication No.: US11004940B1Publication Date: 2021-05-11
- Inventor: Siddarth Sundaresan , Ranbir Singh , Jaehoon Park
- Applicant: GeneSiC Semiconductor Inc.
- Applicant Address: US VA Dulles
- Assignee: GeneSiC Semiconductor Inc.
- Current Assignee: GeneSiC Semiconductor Inc.
- Current Assignee Address: US VA Dulles
- Agency: Dave Law Group LLC
- Agent Raj S. Dave
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/49 ; H01L29/78 ; H01L27/02

Abstract:
An embodiment relates to a n-type planar gate DMOSFET comprising a Silicon Carbide (SiC) substrate. The SiC substrate includes a N+ substrate, a N− drift layer, a P-well region and a first N+ source region within each P-well region. A second N+ source region is formed between the P-well region and a source metal via a silicide layer. During third quadrant operation of the DMOSFET, the second N+ source region starts depleting when a source terminal is positively biased with respect to a drain terminal. The second N+ source region impacts turn-on voltage of body diode regions of the DMOSFET by establishing short-circuitry between the P-well region and the source metal when the second N+ source region is completely depleted.
Information query
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