Invention Grant
- Patent Title: Integrated circuit including at least one nano-ridge transistor
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Application No.: US16552468Application Date: 2019-08-27
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Publication No.: US11004962B2Publication Date: 2021-05-11
- Inventor: Robert Langer , Niamh Waldron , Bernardette Kunert
- Applicant: IMEC vzw
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: EP18192466 20180904
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L29/737 ; H01L21/02 ; H01L27/06 ; H01L29/06 ; H01L29/66

Abstract:
The disclosed technology generally relates to integrated circuit devices having at least one transistor, and methods of fabricating the same. In one aspect, an integrated circuit device can be produced from a silicon substrate and can include at least one nano-ridge transistor formed from III-V semiconducting crystal portions. The III-V portions can be grown epitaxially from the silicon substrate using an intermediate portion which can be adapted to produce aspect ratio trapping. The nano-ridge transistor can have a reduced footprint on the silicon substrate, may be adapted for power RF applications, and can be combined with MOS or CMOS transistors within one and a same integrated circuit.
Public/Granted literature
- US20200075750A1 INTEGRATED CIRCUIT INCLUDING AT LEAST ONE NANO-RIDGE TRANSISTOR Public/Granted day:2020-03-05
Information query
IPC分类: