Invention Grant
- Patent Title: System for transferring substrate
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Application No.: US16256960Application Date: 2019-01-24
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Publication No.: US11008181B2Publication Date: 2021-05-18
- Inventor: Youngsoo Ko , Seungkyu Park
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si
- Agency: Innovation Counsel LLP
- Priority: KR10-2018-0065190 20180607
- Main IPC: B65G47/91
- IPC: B65G47/91 ; G01L1/18 ; H05K13/04 ; G01L5/00 ; H05K13/08 ; B25J15/06

Abstract:
A system for transferring a substrate may adjust a suction force to a suitable level. The system may include a work table, a picker, and a pressure measuring unit. The work table may include a work area for supporting the substrate. The picker may be disposed above the work table and may include a suction unit for providing the suction force. The pressure measuring unit may overlap the suction unit and may include a pressure-sensitive element for facilitating adjustment of the suction force.
Information query
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