Invention Grant
- Patent Title: Microelectromechanical and/or nanoelectromechanical device offering improved robustness
-
Application No.: US16215925Application Date: 2018-12-11
-
Publication No.: US11008213B2Publication Date: 2021-05-18
- Inventor: Helene Lhermet
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1761989 20171212
- Main IPC: G01L1/18
- IPC: G01L1/18 ; B81B3/00 ; G01P15/12

Abstract:
A microelectromechanical and/or nanoelectromechanical device having a fixed part, at least one suspended part configured to be moveable in the plane of the device with respect to the fixed part along at least one first direction and a first suspension means for suspending the suspended part. The first suspension means includes two suspension elements each having a first end fixed directly to the suspended part and a second end connected to the fixed part, each suspension element having a half-ellipse shape in the plane and extending between the first end and the second end, and the two suspension elements being arranged with respect to each other so as to form an ellipse.
Public/Granted literature
- US20190177153A1 MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL DEVICE OFFERING IMPROVED ROBUSTNESS Public/Granted day:2019-06-13
Information query