Invention Grant
- Patent Title: DC magnetron sputtering
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Application No.: US15478283Application Date: 2017-04-04
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Publication No.: US11008651B2Publication Date: 2021-05-18
- Inventor: Scott Haymore , Amit Rastogi , Rhonda Hyndman , Steve Burgess , Ian Moncrieff , Chris Kendal
- Applicant: SPTS TECHNOLOGIES LIMITED
- Applicant Address: GB Newport
- Assignee: SPTS TECHNOLOGIES LIMITED
- Current Assignee: SPTS TECHNOLOGIES LIMITED
- Current Assignee Address: GB Newport
- Agency: Hodgson Russ LLP
- Priority: GB1606115 20160411
- Main IPC: C23C14/06
- IPC: C23C14/06 ; C23C14/34 ; C23C14/35 ; C23C14/50 ; C23C14/54 ; H01J37/32 ; H01J37/34

Abstract:
A DC magnetron sputtering apparatus is for depositing a film on a substrate. The apparatus includes a chamber, a substrate support positioned within the chamber, a DC magnetron, and an electrical signal supply device for supplying an electrical bias signal that, in use, causes ions to bombard a substrate positioned on the substrate support. The substrate support includes a central region surrounded by an edge region, the central region being raised with respect to the edge region.
Public/Granted literature
- US20170294294A1 DC Magnetron Sputtering Public/Granted day:2017-10-12
Information query
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