Method for wavefront measurement of optical imaging system based on grating shearing interferometry
Abstract:
A method for wavefront measurement of optical imaging system based on grating shearing interferometry, the grating shearing interferometer comprising: a light source and illumination system, an optical imaging system to be tested, a one-dimensional diffraction grating plate, a two-dimensional diffraction grating plate, a two-dimensional photoelectric sensor and a computing unit. The one-dimensional diffraction grating plate and the two-dimensional diffraction grating plate are respectively placed on the object side and the image side of the optical imaging system to be tested. By collecting N sets of interferograms with a 2 ⁢ π N phase-shifting interval (where, N = 2 ⁢ ( fix ⁡ ( ceil ⁡ ( 1 / s ) 2 ) + 1 ) , s is the shear ratio of the grating shearing interferometer), combined with a certain phase retrieval algorithm, the influence of all high-order diffraction beams on the phase retrieval accuracy is eliminated, and finally the wavefront measurement accuracy for the optical imaging system is improved.
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