Invention Grant
- Patent Title: Piezoresistive sensor
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Application No.: US16290215Application Date: 2019-03-01
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Publication No.: US11009417B2Publication Date: 2021-05-18
- Inventor: Masayuki Yoneda , Hirofumi Tojo
- Applicant: Azbil Corporation
- Applicant Address: JP Tokyo
- Assignee: Azbil Corporation
- Current Assignee: Azbil Corporation
- Current Assignee Address: JP Tokyo
- Priority: JPJP2018-045377 20180313
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A piezoresistive sensor includes a piezoresistive region to which first conductivity type impurity has been introduced, the piezoresistive region being formed in a semiconductor layer; a protection region to which second conductivity type impurity has been introduced, the protection region covering a top of a region in which the piezoresistive region is formed, the protection region being formed in the semiconductor layer; and contact regions to which the first conductivity type impurities have been introduced, the contact regions being connected to the piezoresistive region, the contact regions being formed so as to reach a surface of the semiconductor layer except a region in which the protection region is formed, in which the following inequality holds: impurity concentration of the piezoresistive region
Public/Granted literature
- US20190285495A1 PIEZORESISTIVE SENSOR Public/Granted day:2019-09-19
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