Invention Grant
- Patent Title: Integrated circuit layout validation using machine learning
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Application No.: US16572189Application Date: 2019-09-16
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Publication No.: US11010529B2Publication Date: 2021-05-18
- Inventor: Rachid Salik , Chin-Chang Hsu , Cheng-Chi Wu , Chien-Wen Chen , Wen-Ju Yang
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: Jones Day
- Main IPC: G06F30/398
- IPC: G06F30/398 ; G06T7/00 ; G06N20/00

Abstract:
Systems, methods, and devices are described herein for integrated circuit (IC) layout validation. A plurality of IC patterns are collected which include a first set of patterns capable of being manufactured and a second set of patterns incapable of being manufactured. A machine learning model is trained using the plurality of IC patterns. The machine learning model generates a prediction model for validating IC layouts. The prediction model receives data including a set of test patterns comprising scanning electron microscope (SEM) images of IC patterns. Design violations associated with an IC layout are determined based on the SEM images and the plurality of IC patterns. A summary of the design violations is provided for further characterization of the IC layout.
Public/Granted literature
- US20210081509A1 INTEGRATED CIRCUIT LAYOUT VALIDATION USING MACHINE LEARNING Public/Granted day:2021-03-18
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