Invention Grant
- Patent Title: Semiconductor structure having buried gate, buried source and drain contacts, and strained silicon and method of manufacturing the same
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Application No.: US16547331Application Date: 2019-08-21
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Publication No.: US11011637B2Publication Date: 2021-05-18
- Inventor: Tse-Yao Huang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423 ; H01L27/108 ; H01L29/66

Abstract:
The present disclosure provides a semiconductor structure and a method for preparing the semiconductor structure. The semiconductor structure includes a substrate; a drain disposed in the substrate; a drain contact disposed in the drain; a source disposed in the substrate; a source contact disposed in the source; a gate structure with a bottom disposed in the substrate between the drain and the source; a channel disposed at the bottom of the gate structure connecting the drain and the source; a drain stressor disposed in the drain between the gate structure and the drain contact; a drain strained silicon layer disposed in the substrate surrounding the drain stressor connected to the channel; a source stressor disposed in the source between the source contact and the gate structure; and a source strained silicon layer disposed in the substrate surrounding the source stressor connected to the channel.
Public/Granted literature
Information query
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