Invention Grant
- Patent Title: Enhanced coercivity in MTJ devices by contact depth control
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Application No.: US15487964Application Date: 2017-04-14
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Publication No.: US11011698B2Publication Date: 2021-05-18
- Inventor: Anthony J. Annunziata , Gen P. Lauer , Nathan P. Marchack
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Erik Johnson
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L43/12 ; H01L43/08 ; H01L43/02 ; H01L27/22 ; G11C11/16

Abstract:
A magnetic memory device includes a magnetic memory stack including a bottom electrode and having a hard mask formed thereon. An encapsulation layer is formed over sides of the magnetic memory stack and has a thickness adjacent to the sides formed on the bottom electrode. A dielectric material is formed over the encapsulation layer and is removed from over the hard mask and gapped apart from the encapsulation layer on the sides of the magnetic memory stack to form trenches between the dielectric material and the encapsulation layer at the sides of the magnetic memory stack. A top electrode is formed over the hard mask and in the trenches such that the top electrode is spaced apart from the bottom electrode by at least the thickness.
Public/Granted literature
- US20170222130A1 ENHANCED COERCIVITY IN MTJ DEVICES BY CONTACT DEPTH CONTROL Public/Granted day:2017-08-03
Information query
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