An imaging part 120 successively generates a plurality of pieces of pattern image data. The binning processing is executed to the plurality of pieces of the pattern image data generated by the imaging part 120, and a computing processing part 132 generates, on the basis of the plurality of pieces of the pattern image data after the binning processing, height data indicating a height image of the measurement target S. The imaging part 120 generates texture image data indicating an image of the measurement target S when the illuminating part 110 irradiates the measurement target S with uniform light. On the basis of the height data generated by the computing processing part 132 and the texture image data generated by the imaging part 120, an inspecting part 230 executes an inspection of the measurement target S.