Invention Grant
- Patent Title: Thin film transistors for memory cell array layer selection
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Application No.: US16457617Application Date: 2019-06-28
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Publication No.: US11017843B2Publication Date: 2021-05-25
- Inventor: Abhishek Sharma , Gilbert Dewey , Willy Rachmady , Van Le , Matthew Metz , Jack Kavalieros
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard & Mughal LLP
- Main IPC: G11C11/24
- IPC: G11C11/24 ; G11C11/4091 ; H01L27/108 ; H01L27/12 ; G11C11/4094 ; G11C11/408

Abstract:
In memory devices where a memory cell includes a thin film cell select transistor, selection between layers of such memory cells may further comprise another thin film select transistor. Bitline and wordline encoding suitable for a memory device having a single layer of memory cells may be scaled up to a 3D memory device having two or more memory cell layers. In a DRAM device one layer of (1TFT-1C) cells may include a 2D array of metal-insulator-metal capacitors over an array of TFTs. Additional layers of such 1TFT-1C cells may be stacked monolithically to form a 3D array. Memory cells in each layer may be accessed through a wordline and local bitline. A local bitline of one cell layer may be coupled to global bitline applicable to all cell layers through a layer-selected TFT according to a voltage applied to a layer-select gate voltage.
Public/Granted literature
- US1261505A Clothes-line tightener. Public/Granted day:1918-04-02
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