Invention Grant
- Patent Title: Metal interconnects
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Application No.: US15962045Application Date: 2018-04-25
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Publication No.: US11018087B2Publication Date: 2021-05-25
- Inventor: Raghuveer R. Patlolla , Cornelius Brown Peethala , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent James Nock
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/768 ; H01L21/288 ; H01L21/3213 ; H01L21/48

Abstract:
Interconnect structures and processes of fabricating the interconnect structures generally includes a recessed metal conductor and a discontinuous capping layer thereon. The discontinuous “capped” metal interconnect structure provides improved performance and reliability for the semiconductor industry.
Public/Granted literature
- US20190333857A1 METAL INTERCONNECTS Public/Granted day:2019-10-31
Information query
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