Invention Grant
- Patent Title: Methods for forming metal electrodes concurrently on silicon regions of opposite polarity
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Application No.: US16496284Application Date: 2018-03-08
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Publication No.: US11018272B2Publication Date: 2021-05-25
- Inventor: Richard Russell
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP17162597 20170323
- International Application: PCT/EP2018/055822 WO 20180308
- International Announcement: WO2018/172098 WO 20180927
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L31/0224 ; H01L31/068 ; C23C18/44 ; H01L31/18 ; C23C18/34 ; H01L21/288

Abstract:
A method for concurrently forming a first metal electrode (31, 58) on an n-type region of a silicon substrate (10) and a second metal electrode (32, 59) on a p-type region of the silicon substrate, wherein the n-type region and the p-type region are respectively exposed in a first and in a second area, is disclosed. The method comprises: depositing (101) an initial metal layer comprising Ni (33, 53) simultaneously in the first area and in the second area by a Ni immersion plating process using a plating solution; and depositing (102) a further metal layer (34, 54) on the initial metal layer comprising Ni (33, 53) in the first area and in the second area by an electroless metal plating process or by an immersion metal plating process, wherein the plating solution comprises Ni and a predetermined amount of another metal different from Ni.
Public/Granted literature
- US20210119066A1 Methods for Forming Metal Electrodes Concurrently on Silicon Regions of Opposite Polarity Public/Granted day:2021-04-22
Information query
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