Invention Grant
- Patent Title: Substrate transport apparatus with independent accessory feedthrough
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Application No.: US16151598Application Date: 2018-10-04
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Publication No.: US11020852B2Publication Date: 2021-06-01
- Inventor: Sean E Plaisted , Leigh F Sharrock , Chris Aitken
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: B25J9/04
- IPC: B25J9/04 ; B25J9/06 ; B25J9/10 ; H01L21/683 ; B25J17/02 ; B25J15/00 ; H01L21/687 ; B25J9/16 ; H01L21/677 ; H01L21/67

Abstract:
A substrate transport apparatus including; a frame, a substrate transport arm connected to the frame, the substrate transport arm having an end effector, and a drive section having at least one motor coupled to the substrate transport arm, wherein the at least one motor defines a kinematic portion of the drive section configured to effect kinematic motion of the substrate transport arm, and the drive section includes an accessory portion adjacent the kinematic portion, wherein the accessory portion has another motor, different and distinct from the at least one motor, the another motor of the accessory portion is operably coupled to and configured to drive one or more accessory device independent of the kinematic motion of the substrate transport arm.
Public/Granted literature
- US20190105770A1 SUBSTRATE TRANSPORT APPARATUS WITH INDEPENDENT ACCESSORY FEEDTHROUGH Public/Granted day:2019-04-11
Information query
IPC分类: