Invention Grant
- Patent Title: Supporting glass substrate
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Application No.: US16941631Application Date: 2020-07-29
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Publication No.: US11021389B2Publication Date: 2021-06-01
- Inventor: Seiji Inaba , Yasunari Saito , Kiyoshi Tamai , Kazutaka Ono , Yuha Kobayashi
- Applicant: AGC Inc.
- Applicant Address: JP Chiyoda-ku
- Assignee: AGC Inc.
- Current Assignee: AGC Inc.
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPPCT/JP2019/029695 20190729,JPJP2019-206867 20191115
- Main IPC: B32B17/00
- IPC: B32B17/00 ; C03C3/087 ; C03C3/085 ; H01L23/15 ; C03C3/095 ; C03C3/091 ; C03C3/097

Abstract:
A supporting glass substrate has a ratio of a Young's modulus (GPa) to a density (g/cm3) that is 37.0 (GPa·cm3/g) or more and the ratio has a value larger than a ratio calculation value, the ratio calculation value being a ratio of a Young's modulus (GPa) calculated from a composition to a density (g/cm3). The ratio calculation value is represented by the following expression: α=2·Σ{(Vi·Gi)/Mi·Xi}, where, in the expression, Vi is a filling parameter of a metal oxide contained in the supporting glass substrate, Gi is a dissociation energy of a metal oxide contained in the supporting glass substrate, Mi is a molecular weight of a metal oxide contained in the supporting glass substrate, and Xi is a molar ratio of a metal oxide contained in the supporting glass substrate.
Public/Granted literature
- US20210032155A1 SUPPORTING GLASS SUBSTRATE Public/Granted day:2021-02-04
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