Invention Grant
- Patent Title: Method of mask layout
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Application No.: US16816276Application Date: 2020-03-12
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Publication No.: US11021784B2Publication Date: 2021-06-01
- Inventor: Enxia Wang , Lingtao Ou , Weili Li , Xiaopeng Lv , Shuaiyan Gan , Ya Wang
- Applicant: Yungu (Gu'an) Technology Co., Ltd.
- Applicant Address: CN Langfang
- Assignee: Yungu (Gu'an) Technology Co., Ltd.
- Current Assignee: Yungu (Gu'an) Technology Co., Ltd.
- Current Assignee Address: CN Langfang
- Agency: Kilpatrick Townsend & Stockton
- Priority: CN201811014280.6 20180831
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/24 ; H01L51/00

Abstract:
The present disclosure relates to a method of a mask layout, including: providing a frame with preset areas arranged at intervals, a positioning area between two adjacent preset areas, and a fixed area provided to offset from the positioning area and each of the preset areas, and a distance between two adjacent preset areas being a first predetermined distance L1; providing a cover mask corresponding to the positioning area, and a distance between an edge of the cover mask and the center of the positioning area being a second predetermined distance L2; and providing an evaporation mask on the fixed area according to preset conditions, a distance between two adjacent fixed areas being a third predetermined distance L3, and the third predetermined distance L3 being equal to a difference between the first predetermined distance L1 and the second predetermined distance L2.
Public/Granted literature
- US20200208252A1 METHOD OF MASK LAYOUT Public/Granted day:2020-07-02
Information query
IPC分类: