Synchronized multi-axis gyroscope
Abstract:
The disclosure relates to a microelectromechanical gyroscope which comprises first and second proof masses which form a first proof mass pair and third and fourth proof masses which form a second proof mass pair. The oscillation of the first and second proof mass pairs is synchronized by a synchronization element which comprises a ringlike body and torsion bars which extend along the x-axis from the ringlike body to the first, second, third and fourth proof masses.
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