Invention Grant
- Patent Title: X-ray transmission inspection apparatus and X-ray transmission inspection method
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Application No.: US16525352Application Date: 2019-07-29
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Publication No.: US11022570B2Publication Date: 2021-06-01
- Inventor: Yoshiki Matoba
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JPJP2018-146481 20180803
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01N23/044 ; G01N23/046 ; G01N23/06 ; G01N23/083 ; G01N23/087 ; G01N23/18

Abstract:
An X-ray transmission inspection apparatus includes an X-ray source for irradiating a sample with X-rays, a two-dimensional sensor for detecting transmission X-rays passing through the sample, a sample moving mechanism for moving the sample, a calculation unit for processing an image of the transmission X-rays detected by the two-dimensional sensor, and a display unit for displaying a cross-sectional image. When V1 is a speed at which the sample moves, F is a frame rate of the two-dimensional sensor, A is a sample pitch of the two-dimensional sensor, and LS is a distance between the X-ray source and the two-dimensional sensor, the calculation unit creates a cross-sectional image taken at a distance L from the X-ray source by adding the images of the pixels positioned at an interval of [(LS×V2)/(L×F×A)] in a direction in which the sample moves.
Public/Granted literature
- US20200041425A1 X-RAY TRANSMISSION INSPECTION APPARATUS AND X-RAY TRANSMISSION INSPECTION METHOD Public/Granted day:2020-02-06
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