Invention Grant
- Patent Title: Three-axis magnetic sensor having perpendicular magnetic anisotropy and in-plane magnetic anisotropy
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Application No.: US16322399Application Date: 2017-07-28
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Publication No.: US11022662B2Publication Date: 2021-06-01
- Inventor: Jin Pyo Hong , Seung Mo Yang , Hae Soo Park
- Applicant: Industry-University Cooperation Foundation Hanyang University
- Applicant Address: KR Seoul
- Assignee: Industry-University Cooperation Foundation Hanyang University
- Current Assignee: Industry-University Cooperation Foundation Hanyang University
- Current Assignee Address: KR Seoul
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2016-0088108 20160712
- International Application: PCT/KR2017/008153 WO 20170728
- International Announcement: WO2018/012953 WO 20180118
- Main IPC: G01R33/09
- IPC: G01R33/09 ; G01R33/02 ; G01R33/00

Abstract:
A three-axis magnetic sensor which is not physically separated from each other and made of one element is provided. A spin-orbit torque is generated through an interface junction between a magnetization seed layer and a magnetization free layer, and through this, a change in an in-plane magnetic field may be sensed in the form of current or voltage in the magnetization seed layer. Further, a tunneling insulating layer and a magnetization pinned layer are formed on the magnetization free layer. The formed structure induces a tunnel magneto-resistance phenomenon. Through this, a change in a magnetic field in a vertical direction is sensed.
Public/Granted literature
- US20190227130A1 THREE-AXIS MAGNETIC SENSOR Public/Granted day:2019-07-25
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