Invention Grant
- Patent Title: Optical assembly with a protective element and optical arrangement therewith
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Application No.: US15965913Application Date: 2018-04-28
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Publication No.: US11022893B2Publication Date: 2021-06-01
- Inventor: Dirk Heinrich Ehm , Stefan-Wolfgang Schmidt
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102015221209.2 20151029
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B5/08 ; G03F1/64 ; G02B26/08 ; G03F1/62 ; G02B1/14 ; G02B1/18

Abstract:
An optical assembly includes an optical element (13), configured in particular for the reflection of EUV radiation (4), and a protective element (30) for protecting a surface (31) of the optical element (13, 14) from contaminating substances (P). The protective element (30) has a membrane (33a-c) and a frame (34) on which the membrane (33a-c) is mounted. The membrane is formed by a plurality of membrane segments (33a, 33b, 33c) which respectively protect a partial region (T) of the surface (31) of the optical element (13) from the contaminating substances (P). The optical assembly can form part of an overall optical arrangement, for example an EUV lithography system.
Public/Granted literature
- US20180246413A1 OPTICAL ASSEMBLY WITH A PROTECTIVE ELEMENT AND OPTICAL ARRANGEMENT THEREWITH Public/Granted day:2018-08-30
Information query
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