A non-transitory computer-readable recording medium storing a program that causes a computer to execute a procedure, the procedure includes generating, for each of a plurality of wafers, extended coordinates including a position on the wafer and a value calculated from a distance from a center of the wafer and a contribution parameter, for each defect on the wafer by using information of a defect position on the wafer, generating a Betti number group by persistent homology processing for a plurality of extended coordinates generated for each of the plurality of wafers generating, for each of the plurality of wafers, a defect pattern image from a plurality of Betti number groups generated for the plurality of values of contribution parameter, and generating machine learning data associating a plurality of defect pattern images generated for the plurality of wafers with determination information associated with the plurality of wafers.