A temperature shock monitor includes a solvent material and a diffusion material. An energy barrier between the solvent material and the diffusion material is selected to be lower than is would conventionally be used in semiconductor devices such that the diffusion material diffuses into the solvent material when exposed to a temperature above a designated temperature threshold. At a later time, electrical parameters of the temperature shock monitor that change based on the amount of diffusion of the diffusion material into the solvent material allows one to determine whether the temperature shock monitor was exposed to a temperature above the temperature threshold.