Invention Grant
- Patent Title: Methods and apparatus for hybrid feature metallization
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Application No.: US16598878Application Date: 2019-10-10
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Publication No.: US11024537B2Publication Date: 2021-06-01
- Inventor: Roey Shaviv , Ismail Emesh , Xikun Wang
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/02 ; H01L21/3213 ; H01L23/532

Abstract:
Methods and apparatus for forming an interconnect, including: depositing a first barrier layer upon a top surface of a via and a top surface of a trench; filling the via with a first metal, wherein the first metal completely fills the via and forms a metal layer within the trench; etching the metal layer within the trench to expose dielectric sidewalls of the trench, a top surface of the via, and a dielectric bottom of the trench; depositing a second barrier layer upon the dielectric sidewalls, top surface of the via, and the dielectric bottom of the trench; and filling the trench with a second metal different than the first metal.
Public/Granted literature
- US20210043506A1 METHODS AND APPARATUS FOR HYBRID FEATURE METALLIZATION Public/Granted day:2021-02-11
Information query
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