Invention Grant
- Patent Title: Dual power structure with connection pins
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Application No.: US16382478Application Date: 2019-04-12
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Publication No.: US11024579B2Publication Date: 2021-06-01
- Inventor: Shih-Wei Peng , Chih-Ming Lai , Chun-Kuang Chen , Chih-Liang Chen , Charles Chew-Yuen Young , Jiann-Tyng Tzeng , Kam-Tou Sio , Ru-Gun Liu , Yung-Sung Yen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522 ; H01L21/768 ; H01L49/02

Abstract:
The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method includes forming a plurality of gate structures extending in a first direction over a substrate between a plurality of source/drain regions. A lower power rail is formed extending in a second direction perpendicular to the first direction. A first connection pin is formed to be electrically coupled to one of the plurality of source/drain regions and to the lower power rail. The first connection pin is formed according to a cut mask having cut regions that define opposing ends of the first connection pin. An upper power rail is formed directly over the lower power rail and extending in the second direction. The upper power rail is electrically coupled to the first connection pin.
Public/Granted literature
- US20190244901A1 DUAL POWER STRUCTURE WITH CONNECTION PINS Public/Granted day:2019-08-08
Information query
IPC分类: