Invention Grant
- Patent Title: High-K metal gate transistor structure and fabrication method thereof
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Application No.: US15337894Application Date: 2016-10-28
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Publication No.: US11024627B2Publication Date: 2021-06-01
- Inventor: Yong Li
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai; CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201510894275.9 20151207
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L27/092 ; H01L21/8238 ; H01L29/51 ; H01L29/78 ; H01L29/66 ; H01L21/3105 ; H01L21/321 ; H01L21/324 ; H01L29/06 ; H01L29/49

Abstract:
The present disclosure provides HKMG transistor structures and fabrication methods thereof. An exemplary method includes providing a base substrate having a first region and a second region; forming a dielectric layer having a first opening in the first region and a second opening in the second region over; forming a gate dielectric layer on a side surface of the first opening and a portion of the base substrate in the first opening and on a side surface of the second opening and a portion of the base substrate in the second opening; filling a sacrificial layer in the first opening; forming a second work function layer in the second opening and a second gate electrode layer on the second work function layer; removing the sacrificial layer; and forming a first work function layer in the first opening and a first gate electrode layer on the first work function layer.
Public/Granted literature
- US20170162575A1 HIGH-K METAL GATE TRANSISTOR STRUCTURE AND FABRICATION METHOD THEREOF Public/Granted day:2017-06-08
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