Invention Grant
- Patent Title: Vertical 3D stack NOR device
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Application No.: US16681491Application Date: 2019-11-12
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Publication No.: US11024636B1Publication Date: 2021-06-01
- Inventor: Effendi Leobandung
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Randall Bluestone
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11521 ; H01L27/11526 ; H01L29/04 ; H01L29/16 ; H01L21/28 ; H01L23/522 ; H01L21/768 ; H01L23/528 ; H01L23/535 ; H01L29/423

Abstract:
The present invention provides 3D stack NOR devices having increased storage area. In one aspect, a method of forming a memory device includes: forming a memory stack on a wafer having alternating sacrificial word and bit line layers separated by dielectric layers; patterning a channel hole in the stack; recessing the sacrificial word line layers to form divots along opposite sides of the channel hole; selectively forming a floating gate stack in the divots; filling the channel hole and divots to form a channel; patterning the memory stack into a stair case structure; burying the memory stack in a dielectric; replacing the sacrificial word line layers in the memory stack with word line contacts; and replacing the sacrificial bit line layers in the memory stack with bit line contacts. A memory device is also provided.
Public/Granted literature
- US20210143163A1 Vertical 3D Stack NOR Device Public/Granted day:2021-05-13
Information query
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