Invention Grant
- Patent Title: Method for preventing vacuum pump pipeline from blockage, and chemical vapor deposition machine
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Application No.: US16316348Application Date: 2018-11-14
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Publication No.: US11028475B2Publication Date: 2021-06-08
- Inventor: Jianfeng Shan
- Applicant: HKC Corporation Limited
- Applicant Address: CN Guangdong
- Assignee: HKC Corporation Limited
- Current Assignee: HKC Corporation Limited
- Current Assignee Address: CN Guangdong
- Priority: CN201810724322.9 20180704
- International Application: PCT/CN2018/115304 WO 20181114
- International Announcement: WO2020/006956 WO 20200109
- Main IPC: C23C16/44
- IPC: C23C16/44

Abstract:
The present disclosure relates to the technical field of chemical vapor deposition coating equipment, and discloses a method for preventing vacuum pump pipeline from blockage, which includes the following steps: opening a gas source, and introducing reaction gas into a process chamber from the gas source; carrying out a coating reaction of a chemical vapor deposition machine in the process chamber; after coating, closing the gas source, and introducing heated inert gas into an air exhaust pipe connected to an outlet of a vacuum pump; turning on the vacuum pump, and introducing dust and exhaust gas in the process chamber into a exhaust gas treatment device through the air exhaust pipe. The present disclosure also provides a chemical vapor deposition machine applying the method for preventing the vacuum pump pipeline from blockage.
Public/Granted literature
- US20200208262A1 METHOD FOR PREVENTING VACUUM PUMP PIPELINE FROM BLOCKAGE, AND CHEMICAL VAPOR DEPOSITION MACHINE Public/Granted day:2020-07-02
Information query
IPC分类: