• Patent Title: Method for preventing vacuum pump pipeline from blockage, and chemical vapor deposition machine
  • Application No.: US16316348
    Application Date: 2018-11-14
  • Publication No.: US11028475B2
    Publication Date: 2021-06-08
  • Inventor: Jianfeng Shan
  • Applicant: HKC Corporation Limited
  • Applicant Address: CN Guangdong
  • Assignee: HKC Corporation Limited
  • Current Assignee: HKC Corporation Limited
  • Current Assignee Address: CN Guangdong
  • Priority: CN201810724322.9 20180704
  • International Application: PCT/CN2018/115304 WO 20181114
  • International Announcement: WO2020/006956 WO 20200109
  • Main IPC: C23C16/44
  • IPC: C23C16/44
Method for preventing vacuum pump pipeline from blockage, and chemical vapor deposition machine
Abstract:
The present disclosure relates to the technical field of chemical vapor deposition coating equipment, and discloses a method for preventing vacuum pump pipeline from blockage, which includes the following steps: opening a gas source, and introducing reaction gas into a process chamber from the gas source; carrying out a coating reaction of a chemical vapor deposition machine in the process chamber; after coating, closing the gas source, and introducing heated inert gas into an air exhaust pipe connected to an outlet of a vacuum pump; turning on the vacuum pump, and introducing dust and exhaust gas in the process chamber into a exhaust gas treatment device through the air exhaust pipe. The present disclosure also provides a chemical vapor deposition machine applying the method for preventing the vacuum pump pipeline from blockage.
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