Invention Grant
- Patent Title: Single crystal pulling apparatus including a dopant supplying means having a tube with a plurality of blowing ports
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Application No.: US16340529Application Date: 2017-09-19
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Publication No.: US11028498B2Publication Date: 2021-06-08
- Inventor: Satoshi Soeta , Kazuya Nakagawa
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2016-214691 20161101
- International Application: PCT/JP2017/033749 WO 20170919
- International Announcement: WO2018/083899 WO 20180511
- Main IPC: C30B15/04
- IPC: C30B15/04 ; C30B29/06

Abstract:
A single crystal pulling apparatus including a dopant supplying means which includes: a charging device provided outside a chamber for storing a dopant and charging the dopant into the chamber; a sublimation room provided inside the chamber for holding and sublimating the dopant charged from the charging device; a carrier gas-introducing device for introducing a carrier gas into the sublimation room; and a blowing device for blowing the dopant sublimated in the sublimation room together with the carrier gas onto a surface of a raw-material melt. The blowing device includes a tube connected to the sublimation room and blowing ports such that the sublimated dopant is scattered from the blowing ports via the tube and blown onto the surface of the raw-material melt. This provides a single crystal pulling apparatus capable of efficient doping with a sublimable dopant within the shortest possible time.
Public/Granted literature
- US20200048789A1 SINGLE CRYSTAL PULLING APPARATUS Public/Granted day:2020-02-13
Information query
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