Invention Grant
- Patent Title: Method for growing β phase of gallium oxide ([β]-Ga2O3) single crystals from the melt contained within a metal crucible
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Application No.: US15541764Application Date: 2015-12-16
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Publication No.: US11028501B2Publication Date: 2021-06-08
- Inventor: Zbigniew Galazka , Reinhard Uecker , Detlef Klimm , Matthias Bickermann
- Applicant: FORSCHUNGSVERBUND BERLIN E.V.
- Applicant Address: DE Berlin
- Assignee: FORSCHUNGSVERBUND BERLIN E.V.
- Current Assignee: FORSCHUNGSVERBUND BERLIN E.V.
- Current Assignee Address: DE Berlin
- Agency: Wood, Phillips, Katz, Clark & Mortimer
- Priority: EP15150582 20150109
- International Application: PCT/EP2015/079938 WO 20151216
- International Announcement: WO2016/110385 WO 20160714
- Main IPC: C30B29/16
- IPC: C30B29/16 ; C30B11/00 ; C30B15/08 ; C30B15/34 ; C30B17/00 ; C30B15/20
![Method for growing β phase of gallium oxide ([β]-Ga2O3) single crystals from the melt contained within a metal crucible](/abs-image/US/2021/06/08/US11028501B2/abs.jpg.150x150.jpg)
Abstract:
A method for growing beta phase of gallium oxide (β-Ga2O3) single crystals from the melt contained within a metal crucible surrounded by a thermal insulation and heated by a heater. A growth atmosphere provided into a growth furnace has a variable oxygen concentration or partial pressure in such a way that the oxygen concentration reaches a growth oxygen concentration value (C2, C2′, C2″) in the concentration range (SC) of 5-100 vol. % below the melting temperature (MT) of Ga2O3 or at the melting temperature (MT) or after complete melting of the Ga2O3 starting material adapted to minimize creation of metallic gallium amount and thus eutectic formation with the metal crucible. During the crystal growth step of the β-Ga2O3 single crystal from the melt at the growth temperature (GT) the growth oxygen concentration value (C2, C2′, C2″) is maintained within the oxygen concentration range (SC).
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