Invention Grant
- Patent Title: Electromagnetic unit, magnetic bearing device, and vacuum pump
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Application No.: US15741945Application Date: 2016-07-01
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Publication No.: US11028853B2Publication Date: 2021-06-08
- Inventor: Toshiaki Kawashima
- Applicant: Edwards Japan Limited
- Applicant Address: JP Yachiyo
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Yachiyo
- Agency: Shumaker & Sieffert, P.A.
- Priority: JPJP2015-135951 20150707
- International Application: PCT/JP2016/069573 WO 20160701
- International Announcement: WO2017/006844 WO 20170112
- Main IPC: H02K7/09
- IPC: H02K7/09 ; F04D19/04 ; H02K11/00 ; F16C32/04 ; H02K11/21 ; F04D17/16

Abstract:
An electromagnet unit, a magnetic bearing device, and a vacuum pump with which displacement of a rotating body in a radial direction can be detected with precision. An upper electromagnet unit includes: radial electromagnets for supporting a rotor in a radial direction without contact; radial sensors for detecting displacement of the rotor in the radial direction; and a core around which coils are wound. Two radial electromagnets that are adjacent to each other in a circumferential direction of the core are disposed such that adjacent magnetic poles belonging respectively to the two radial electromagnets are homopolar, and a low magnetic flux interference region is formed between the two radial electromagnets. Each of the radial sensors is disposed in the low magnetic flux interference region.
Public/Granted literature
- US20190024667A1 ELECTROMAGNETIC UNIT, MAGNETIC BEARING DEVICE, AND VACUUM PUMP Public/Granted day:2019-01-24
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