Invention Grant
- Patent Title: Method of and system for detecting structures on or below the surface of a sample using a probe including a cantilever and a probe tip
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Application No.: US16477845Application Date: 2018-01-12
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Publication No.: US11029329B2Publication Date: 2021-06-08
- Inventor: Hamed Sadeghian Marnani
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL s-Gravenhage
- Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee Address: NL s-Gravenhage
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: EP17151440 20170113
- International Application: PCT/NL2018/050024 WO 20180112
- International Announcement: WO2018/132008 WO 20180719
- Main IPC: G01Q60/30
- IPC: G01Q60/30 ; G01N29/06 ; G01N29/24 ; G01Q60/38

Abstract:
The present document relates to a method of detecting structures on or below the surface of a sample using a probe including a cantilever and a probe tip, the cantilever being characterized by one ore more normal modes of resonance including a fundamental resonance frequency, the method including: applying, using a transducer, a vibrational input signal to the sample; sensing, while the probe tip is in contact with the surface, an output signal indicative of motion of the probe tip due to vibrations at the surface induced by the vibrational input signal; wherein the vibrational input signal comprises at least a first signal component having a frequency within a range of 10 to 100 megahertz; and wherein the vibrational input signal is amplitude modulated using at least a second signal component having a modulation frequency below 5 megahertz. The present document further relates to a scanning probe microscopy method.
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