Invention Grant
- Patent Title: Failure detection and classsification using sensor data and/or measurement data
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Application No.: US16297403Application Date: 2019-03-08
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Publication No.: US11029359B2Publication Date: 2021-06-08
- Inventor: Tomonori Honda , Lin Lee Cheong , Lakshmikar Kuravi
- Applicant: PDF Solutions, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: PDF Solutions, Inc.
- Current Assignee: PDF Solutions, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dergosits & Noah LLP
- Main IPC: G01R31/3183
- IPC: G01R31/3183 ; G06N20/00 ; G06F30/30

Abstract:
A model is generated for predicting failures at the wafer production level. Input data from sensors is stored as an initial dataset, then data exhibiting excursions or useless impact is removed from the dataset. The dataset is converted into target features, where the target features are useful in predicting whether a wafer will be normal or not. A trade-off between positive and negative results is selected, and a plurality of predictive models are created. The final model is selected based on the trade-off criteria, and deployed.
Public/Granted literature
- US20190277913A1 FAILURE DETECTION AND CLASSSIFICATION USING SENSOR DATA AND/OR MEASUREMENT DATA Public/Granted day:2019-09-12
Information query
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