Invention Grant
- Patent Title: Optimization based on machine learning
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Application No.: US16527098Application Date: 2019-07-31
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Publication No.: US11029605B2Publication Date: 2021-06-08
- Inventor: Xiaofeng Liu
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G06N20/00
- IPC: G06N20/00 ; G03F7/20 ; G06F30/00 ; G06F30/20 ; G06N20/10

Abstract:
A method for improving a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic apparatus, the method including: obtaining a first source of the lithographic apparatus; classifying the first source into a class among a plurality of possible classes, based on one or more numerical characteristics of the first source, using a machine learning model, by a computer; determining whether the class is among one or more predetermined classes; only when the class is among the one or more predetermined classes, adjusting one or more source design variables to obtain a second source.
Public/Granted literature
- US20190354023A1 OPTIMIZATION BASED ON MACHINE LEARNING Public/Granted day:2019-11-21
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