Invention Grant
- Patent Title: Method for growing gallium nitride based on graphene and magnetron sputtered aluminum nitride
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Application No.: US16083255Application Date: 2016-09-28
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Publication No.: US11031240B2Publication Date: 2021-06-08
- Inventor: Jincheng Zhang , Jing Ning , Dong Wang , Zhibin Chen , Zhiyu Lin , Yue Hao
- Applicant: XIDIAN UNIVERSITY
- Applicant Address: CN Xi'an
- Assignee: XIDIAN UNIVERSITY
- Current Assignee: XIDIAN UNIVERSITY
- Current Assignee Address: CN Xi'an
- Agency: Hsuanyeh Law Group PC
- Priority: CN201610129914.7 20160308,CN201610130918.7 20160308,CN201610130981.0 20160308
- International Application: PCT/CN2016/100539 WO 20160928
- International Announcement: WO2017/152620 WO 20170914
- Main IPC: H01L21/02
- IPC: H01L21/02 ; C23C14/35 ; H01L29/20 ; C30B25/18 ; C30B29/40 ; C23C14/06 ; C23C16/30 ; C23C16/02

Abstract:
The present invention discloses a method for growing gallium nitride based on graphene and magnetron sputtered aluminum nitride, and a gallium nitride thin film. The method according to an embodiment comprises: spreading graphene over a substrate; magnetron sputtering an aluminum nitrite onto the graphene-coated substrate to obtain a substrate sputtered with aluminum nitrite; placing the substrate sputtered with aluminum nitride into a MOCVD reaction chamber and heat treating the substrate to obtain a heat treated substrate; growing an aluminum nitride transition layer on the heat treated substrate and a first and a second gallium nitride layer having different V-III ratios, respectively. The gallium nitrate thin film according to an embodiment comprises the following structures in order from bottom to top: a substrate (1), a graphene layer (2), an aluminum nitride nucleation layer (3) fabricated by using a magnetron sputtering method, an aluminum nitride transition layer (4) grown by MOCVD, and a first and a second gallium nitrate layer (5, 6) having different V-III ratios.
Public/Granted literature
- US20190108999A1 METHOD FOR GROWING GALLIUM NITRIDE BASED ON GRAPHENE AND MAGNETRON SPUTTERED ALUMINIUM NITRIDE Public/Granted day:2019-04-11
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