Invention Grant
- Patent Title: Connectivity detection for wafer-to-wafer alignment and bonding
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Application No.: US16426984Application Date: 2019-05-30
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Publication No.: US11031308B2Publication Date: 2021-06-08
- Inventor: Seungpil Lee , Kwang-Ho Kim
- Applicant: SanDisk Technologies LLC
- Applicant Address: US TX Addison
- Assignee: SanDisk Technologies LLC
- Current Assignee: SanDisk Technologies LLC
- Current Assignee Address: US TX Addison
- Agency: Vierra Magen Marcus LLP
- Main IPC: H01L25/18
- IPC: H01L25/18 ; H01L21/66 ; H01L27/11582 ; H01L25/00 ; H01L21/78 ; H01L23/00 ; G01R31/50

Abstract:
A first workpiece includes first active pads, a first test pad, and a second test pad on a primary surface of the first workpiece, the first test pad electrically connected to the second test pad. A second workpiece includes second active pads, a third test pad, and a fourth test pad on a primary surface of the second workpiece. The first and second workpieces are bonded along an interface between the primary surface of the first workpiece and the primary surface of the second workpiece to bond the first active pads with the second active pads, bond the first test pad with the third test pad, and bond the second test pad with the fourth test pad. Connectivity detection circuits test electrical connectivity between the third test pad and the fourth test pad.
Public/Granted literature
- US20200381316A1 CONNECTIVITY DETECTION FOR WAFER-TO-WAFER ALIGNMENT AND BONDING Public/Granted day:2020-12-03
Information query
IPC分类: