Invention Grant
- Patent Title: Nonvolatile memory device and method for fabricating the same
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Application No.: US16425365Application Date: 2019-05-29
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Publication No.: US11031410B2Publication Date: 2021-06-08
- Inventor: Se Jun Park , Min-Tai Yu , Jae Duk Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2018-0125725 20181022
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; G11C5/06

Abstract:
A nonvolatile memory device in which reliability is improved and a method for fabricating the same are provided. The nonvolatile memory device includes a mold structure which includes a first insulating pattern, a first gate electrode and a second insulating pattern sequentially stacked on a substrate, a semiconductor pattern which penetrates the mold structure, is connected to the substrate, and extends in a first direction, a first charge storage film extending in the first direction between the first insulating pattern and the second insulating pattern and between the first gate electrode and the semiconductor pattern, and a blocking insulation film between the first gate electrode and the first charge storage film, wherein a first length at which the first charge storage film extends in the first direction is longer than a second length at which the blocking insulation film extends in the first direction.
Information query
IPC分类: