Invention Grant
- Patent Title: Method of manufacturing a semiconductor device and a semiconductor device
-
Application No.: US16859155Application Date: 2020-04-27
-
Publication No.: US11031412B2Publication Date: 2021-06-08
- Inventor: Yun-Chi Wu , Yu-Wen Tseng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L29/423 ; H01L27/12 ; H01L29/51 ; H01L29/66 ; H01L29/06 ; B82Y10/00 ; H01L29/792 ; H01L29/775 ; H01L27/11568

Abstract:
A non-volatile memory (NVM) cell includes a semiconductor wire including a select gate portion and a control gate portion. The NVM cell includes a select transistor formed with the select gate portion and a control transistor formed with the control gate portion. The select transistor includes a gate dielectric layer disposed around the select gate portion and a select gate electrode disposed on the gate dielectric layer. The control transistor includes a stacked dielectric layer disposed around the control gate portion, a gate dielectric layer disposed on the stacked dielectric layer and a control gate electrode disposed on the gate dielectric layer. The stacked dielectric layer includes a first silicon oxide layer disposed on the control gate portion, a charge trapping layer disposed on the first silicon oxide, and a second silicon oxide layer disposed on the charge trapping layer.
Public/Granted literature
- US20200258893A1 METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR DEVICE Public/Granted day:2020-08-13
Information query
IPC分类: