Invention Grant
- Patent Title: Vertical microbolometer contact systems and methods
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Application No.: US16226580Application Date: 2018-12-19
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Publication No.: US11031432B2Publication Date: 2021-06-08
- Inventor: James L. Dale , Christopher Chan , Eric A. Kurth
- Applicant: FLIR Systems, Inc.
- Applicant Address: US OR Wilsonville
- Assignee: FLIR Systems, Inc.
- Current Assignee: FLIR Systems, Inc.
- Current Assignee Address: US OR Wilsonville
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/33 ; H04N5/378 ; G01J5/02 ; G01J5/20

Abstract:
Systems and methods are directed to vertical legs for an infrared detector. For example, an infrared imaging device may include a microbolometer array in which each microbolometer includes a bridge and a vertical leg structure that couples the bridge to a substrate such as a readout integrated circuit. The vertical leg structure may run along a path that is parallel to a plane defined by the bridge and may be oriented perpendicularly to the plane. The path may be disposed within, below, or above the plane defined by the bridge.
Public/Granted literature
- US20190148443A1 VERTICAL MICROBOLOMETER CONTACT SYSTEMS AND METHODS Public/Granted day:2019-05-16
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