Invention Grant
- Patent Title: Low resistance high capacitance density MIM capacitor
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Application No.: US15843145Application Date: 2017-12-15
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Publication No.: US11031457B2Publication Date: 2021-06-08
- Inventor: Baozhen Li , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent L. Jeffrey Kelly
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L27/108 ; H01L49/02

Abstract:
Embodiments are directed to a method and resulting structures for forming low resistance, high capacitance density MIM capacitors. In a non-limiting embodiment, one or more bottom plate contacts are formed over a substrate. A bottom capacitor plate is formed directly on a top surface and a sidewall of each of the one or more bottom plate contacts. A capacitor dielectric layer is formed directly on a surface of the bottom capacitor plate. A top capacitor plate is formed directly on a surface of the capacitor dielectric layer. A first portion of the top capacitor plate extends past a sidewall of the bottom capacitor plate in a direction parallel to the substrate. A top plate contact is formed directly on the first portion of the top capacitor plate.
Public/Granted literature
- US20190189735A1 LOW RESISTANCE HIGH CAPACITANCE DENSITY MIM CAPACITOR Public/Granted day:2019-06-20
Information query
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