Invention Grant
- Patent Title: Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device
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Application No.: US16574224Application Date: 2019-09-18
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Publication No.: US11031475B2Publication Date: 2021-06-08
- Inventor: Satoru Nagao , Yusuke Tsukada , Kazunori Kamada , Shuichi Kubo , Hirotaka Ikeda , Kenji Fujito , Hideo Fujisawa , Yutaka Mikawa , Tae Mochizuki
- Applicant: Mitsubishi Chemical Corporation
- Applicant Address: JP Chiyoda-ku
- Assignee: Mitsubishi Chemical Corporation
- Current Assignee: Mitsubishi Chemical Corporation
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-165293 20130808,JP2014-006907 20140117,JP2014-038722 20140228,JP2014-090535 20140424,JP2014-104383 20140520,JP2014-122520 20140613
- Main IPC: C30B25/20
- IPC: C30B25/20 ; H01L29/20 ; C30B29/40 ; C30B25/18 ; C30B7/10 ; H01L21/02 ; C30B23/02

Abstract:
An object is to provide a nonpolar or semipolar GaN substrate having improved size and crystal quality. A self-standing GaN substrate has an angle between the normal of the principal surface and an m-axis of 0 degrees or more and 20 degrees or less, wherein: the size of the projected image in a c-axis direction when the principal surface is vertically projected on an M-plane is 10 mm or more; and when an a-axis length is measured on an intersection line between the principal surface and an A-plane, a low distortion section with a section length of 6 mm or more and with an a-axis length variation within the section of 10.0×10 −5 Å or less is observed.
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