Invention Grant
- Patent Title: Microelectromechanical microphone
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Application No.: US16235927Application Date: 2018-12-28
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Publication No.: US11032629B2Publication Date: 2021-06-08
- Inventor: Roberto Brioschi , Paul Anthony Barbara
- Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS (MALTA) LTD
- Applicant Address: IT Agrate Brianza; MT Kirkop
- Assignee: STMICROELECTRONICS S.R.L.,STMICROELECTRONICS (MALTA) LTD
- Current Assignee: STMICROELECTRONICS S.R.L.,STMICROELECTRONICS (MALTA) LTD
- Current Assignee Address: IT Agrate Brianza; MT Kirkop
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT10201529270 20150630,IT10201556964 20150930,IT10201584541 20151217
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H04R1/04 ; B81B7/00 ; H04R19/00 ; H04R19/04 ; H04R31/00 ; H04R1/06

Abstract:
A microelectromechanical microphone includes: a substrate; a sensor chip, integrating a microelectromechanical electroacoustic transducer; and a control chip operatively coupled to the sensor chip. In one embodiment, the sensor chip and the control chip are bonded to the substrate, and the sensor chip overlies, or at least partially overlies, the control chip. In another embodiment, the sensor is bonded to the substrate and a barrier is located around at least a portion of the sensor chip.
Public/Granted literature
- US20190141426A1 MICROELECTROMECHANICAL MICROPHONE Public/Granted day:2019-05-09
Information query
IPC分类: