Invention Grant
- Patent Title: Organic vapor jet print head with orthogonal delivery and exhaust channels
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Application No.: US16254998Application Date: 2019-01-23
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Publication No.: US11033924B2Publication Date: 2021-06-15
- Inventor: Gregory McGraw , William E. Quinn , Matthew King
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agency: Butzel Long
- Main IPC: B05C5/02
- IPC: B05C5/02 ; G03F7/00 ; H01L51/00 ; B05B7/00 ; H01L51/50

Abstract:
Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.
Public/Granted literature
- US20190232325A1 Organic vapor jet print head with orthogonal delivery and exhaust channels Public/Granted day:2019-08-01
Information query