Invention Grant
- Patent Title: Flow rate control apparatus and flow rate control method for the flow rate control apparatus
-
Application No.: US16495931Application Date: 2018-06-21
-
Publication No.: US11035494B2Publication Date: 2021-06-15
- Inventor: Takashi Funakoshi , Yoshinori Shimomura , Tsuyoshi Tanikawa , Tadayuki Yakushijin
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Locke Lord LLP
- Priority: JPJP2017-122371 20170622
- International Application: PCT/JP2018/023632 WO 20180621
- International Announcement: WO2018/235900 WO 20181227
- Main IPC: F16K37/00
- IPC: F16K37/00 ; F16K43/00

Abstract:
Provided is a flow rate control apparatus capable of being used continuously when the apparatus is used in equipment that operates continuously, and a flow rate control method for the flow rate control apparatus. A flow rate of a fluid is controlled via any one of control valves disposed in branch passages, respectively. When replacement of the one control valve is determined to be necessary on the basis of a signal outputted from a monitoring portion of the one control valve, the one control valve performing flow rate control is closed, and another control valve disposed in another one of the branch passages, is opened, to perform flow rate control with a flow rate equivalent to that before the replacement. Furthermore, on-off valves disposed at upstream and downstream sides of the closed control valve are closed.
Information query