Invention Grant
- Patent Title: System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage
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Application No.: US16688539Application Date: 2019-11-19
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Publication No.: US11035665B2Publication Date: 2021-06-15
- Inventor: Helen (Heng) Liu , GuoQing Zhang
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G06F3/0484

Abstract:
An inspection system is disclosed. In one embodiment, the inspection system includes an interferometer sub-system configured to acquire an interferogram of a sample. The inspection system may further include a controller communicatively coupled to the interferometer sub-system. The controller is configured to: receive the interferogram from the interferometer sub-system; generate a phase map of the sample based on the received interferogram, wherein the phase map includes a plurality of pixels; select a sub-set of pixels of the plurality of pixels of the phase map to be used for phase unwrapping procedures; perform one or more phase unwrapping procedures on the sub-set of pixels of the phase map to generate an unwrapped phase map; and generate a surface height map of the sample based on the unwrapped phase map.
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