A monitoring method and system are present for process control of surface treatment associated with material deposition on the surface, which provides for achieving and maintaining a desired (according to design rules) geometrical profile of the surface while being coated by certain substance/material. The technique of the invention provides for remotely and fully-automatically monitoring/verifying the geometrical profile of the surface being treated, and providing the control/verification data for executing local corrections. The technique can be applied to various geometrical profiles such as planar geometry, round/curved surface of a predetermined curvature, multi-portions surface with predetermined angular orientations of the multiple portions (e.g. 90 degree angles at corners of a room).