Invention Grant
- Patent Title: CMOS thermal fluid flow sensing device employing a flow sensor and a pressure sensor on a single membrane
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Application No.: US16478559Application Date: 2017-12-19
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Publication No.: US11035709B2Publication Date: 2021-06-15
- Inventor: Andrea De Luca , Florin Udrea
- Applicant: Cambridge Enterprise Limited
- Applicant Address: GB Cambridge
- Assignee: Cambridge Enterprise Limited
- Current Assignee: Cambridge Enterprise Limited
- Current Assignee Address: GB Cambridge
- Agency: Tucker Ellis LLP
- Priority: GB1700798 20170117
- International Application: PCT/GB2017/053796 WO 20171219
- International Announcement: WO2018/134552 WO 20180726
- Main IPC: G01F1/68
- IPC: G01F1/68 ; G01F1/688 ; B81B7/00 ; B81C1/00 ; G01F1/684 ; G01F1/69 ; G01F1/698 ; G01K7/02 ; G01L9/06 ; H01L21/306 ; H01L21/3065 ; H01L23/34 ; H01L23/48 ; H01L27/06 ; H01L27/16 ; H01L29/66 ; H01L29/84 ; H01L35/20 ; H01L35/32 ; H01L35/34
Abstract:
A CMOS-based sensing device includes a substrate including an etched portion and a first region located on the substrate. The first region includes a membrane region formed over an area of the etched portion of the substrate, a flow sensor formed within the membrane region and a pressure sensor formed within the membrane region.
Public/Granted literature
- US20200049539A1 A SINGLE MEMBRANE FLOW-PRESSURE SENSING DEVICE Public/Granted day:2020-02-13
Information query
