Invention Grant
- Patent Title: Physical quantity sensor, physical quantity sensor device, portable electronic device, electronic device, and mobile body
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Application No.: US16117188Application Date: 2018-08-30
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Publication No.: US11035875B2Publication Date: 2021-06-15
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2017-167621 20170831
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81B7/00 ; G01P15/08

Abstract:
A physical quantity sensor includes a substrate, a movable section displaceable in a first direction with respect to the substrate, first and second movable electrode sections provided in the movable section, a first fixed electrode section fixed to the substrate and disposed to be opposed to the first movable electrode section in the first direction, a second fixed electrode section fixed to the substrate and disposed to be opposed to the second movable electrode section in the first direction, a restricting section configured to restrict a movable range in the first direction of the movable section, a first wire provided on the substrate and electrically connected to the first fixed electrode section, and a second wire provided on the substrate and electrically connected to the second fixed electrode section. The first wire and the second wire are respectively cross the restricting section in a plan view of the substrate.
Public/Granted literature
Information query
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